Part dimensions can be accomplished by using an optical comparator or simply by scanning an image using a flat bed scanner. Analysis of this type is usually performed to determine if a part is within the specifications determined by the manufacturer. This is important in failure analysis, because if a part is out of specification, that may be the sole reason for failure.

* EDX is Energy Dispersive X Ray, LOM is Light Optical Microscopy, OC is Optical Comparator, SEM is Scanning Electron Microscopy, TEM is Transmission Electron Microscopy